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半导体气体较好控制工艺的流量和压力

来源:hszymm.com 时间:2019-12-31众享彩票

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  半导体气体使用也是比较广泛的,像工业中使用的气体都是称为电子气体。按其种类可分为纯气、高纯气和半导体特种材料气三大类。特种材料气体主要用于外延、掺杂和刻蚀工艺,高纯气体主要用作稀释剂和载气。电子气体是特种气体的一个重要分支。电子气按纯度和使用场合可分为电子级、大规模集成电路级、超大规模集成电路级和超大规模集成电路级。

半导体气体较好控制工艺的流量和压力

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